Mini e-beam evaporator
Ideal for ultra-thin film production in UHV environments. Product from Oxford Alraide Research, UK.
Advanced control is possible, allowing for a range of 0.1 to 50 Å/min for many materials. ≪Applications≫ Fabrication of thin films in the nanometer range, semiconductor doping ≪Features≫ ■ Design that is free from contamination with high cooling efficiency ■ Choice of materials in rod or crucible form ■ Precise film thickness control enabled by the standard flux monitoring plate ■ Available in single pocket and four pocket types; the four pocket type allows for independent control of each pocket and simultaneous deposition of up to four materials.
- 企業：三和真空
- 価格：Other
